Hah, I think there’s two things that stand out in my memory.

- They need 3 Boeing 737’s to ship an EUV machine. - We talked with one guy who’s responsibility it was to design one of the calibration points the machine uses to find it’s zero position. This left me amazed that they’re able to ship a machine halfway across the world, re-assemble it and calibrate it again to such accuracy. And! On top of that, make it reproducible over different machines!

Oh, I've actually seen that in videos! If you Google it, there's tons of pics showing the loading/unloading. They're not one-offs either. TSMC may order 80 at a time.

Hadn't thought about calibration afterwards. Crazy.