I have one! Any idea if the PZT cubes are added using the typical photoresist ma... | Hacker News

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		jaygreco on Sept 23, 2024 \| parent \| context \| favorite \| on: Inside a Ferroelectric RAM Chip I have one! Any idea if the PZT cubes are added using the typical photoresist masking/etching or are they placed on die using some other process?

kens on Sept 23, 2024 [–]

From looking at various patents, I believe they put down a layer of PZT and then etch it into cubes with photolithography. Look at the process diagram at the bottom of my article, step 1128.

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